| File Format | File Name Format | Data Type | |
|---|---|---|---|
| Surface | Curve | ||
| FemtoScan Online | *.spm | + | + |
| NT-MDT | *.mdt *.sm2 | + | + |
| Nanoeducator | *.spm | + | |
| Aist-NT | *.aist | + | + |
| Nanoscope II | *. 0?? | + | |
| Nanoscope III, IV, V | *. 0?? | + | + |
| Dimension | *. 0?? | + | + |
| Asylum Research (Igor Pro) | *.ibw | + | + |
| Park Scientific | *.hdf | + | |
| Molecular Imaging | *.stp | + | |
| WSxM Nanotec Electronica | *.* | + | |
| Nanotop | *.spm | + | |
| Amphora (optical data) | *.tlk | + | + |
| WITec | *.wip | + | + |
| Omicron | *.par | + | |
| Nanosurf | *.nid | + | |
| Pacific Nanotechnology | *.pni, *.pro | + | + |
| Digital Surf | *.sur | + | |